SOI High Temperature Pressure Sensor HPTAXXXX

SOI High Temperature Pressure Sensor HPTAXXXX

High Temperature Pressure Sensor is a kind of high temperature MEMS sensor based on SOI semiconductor materiel . Its operating temperature is -30~180 ..
HPT series sensors have been widely used for measuring diesel spray pressure in the self-control testing components of diesel engines in vehicles and vessels. HPT sensors still can operate normally even though the environment temperature exceeds 180℃.

HPT sensors are produced first by ion implanting the four piezoresistors into silicon. The four resistors are connected in a Wheatstone bridge arrangement, whereby two resistors increase with positive pressure while the other two decrease in resistance. When pressure is applied to the device and two ports of the resistor bridge are supplied with power source, the other two ports will output an electric signal which is directly proportional to pressure. Stress equipartition technology is introduced into the design of die, making the device more robust against high overload. Furthermore, the resistors are isolated with insulating medium which guarantees the high steadiness of sensor device.

wireless temperature sensor

wifi temperature sensor

HPTAXXXX

SOI High Temperature Pressure Sensor HPTAXXXX Images